Exposure apparatus with a stage, driving unit,and force...

Details Exposure apparatus with a stage, driving unit,and force... Exposure apparatus with a stage, driving unit,and force...

2011-04-26

2011-04-26

Tamai, Karl I (Department: 2834)

Electrical generator or motor structure

Dynamoelectric

Linear

C310S012050, C310S012060, C355S053000

Reexamination Certificate

active

07932646

ABSTRACT:
A device includes a stage, a force applying unit configured to apply a magnetically repulsive force to the stage, the force applying unit including a first magnet provided at the stage, and a second magnet provided at an end of a movement stroke of the stage so as to face the first magnet, a driving unit configured to drive the stage within the movement stroke, a magnetic-flux reinforcement unit configured to reinforce magnetic flux of the second magnet, and a magnetic shield configured to shield the magnetic flux of the second magnet.

REFERENCES:
patent: 6326706 (2001-12-01), Zhang
patent: 6469406 (2002-10-01), Hwang et al.
patent: 6731026 (2004-05-01), Kawaguchi et al.
patent: 6750571 (2004-06-01), Tominaga et al.
patent: 6762516 (2004-07-01), Maruyama
patent: 6903468 (2005-06-01), Korenaga
patent: 7663271 (2010-02-01), Akieda et al.
patent: 2003/0155820 (2003-08-01), Tominaga
patent: 2004/0066097 (2004-04-01), Kobayashi et al.
patent: 2004/0095563 (2004-05-01), Korenaga
patent: 2005/0018165 (2005-01-01), Akutsu
patent: 2006/0158129 (2006-07-01), Kitagawa
patent: 2008/0100149 (2008-05-01), Shibata
patent: 2008/0158539 (2008-07-01), Shibata
patent: 2008/0169708 (2008-07-01), Shibata
patent: 1071097 (2001-01-01), None
patent: 1398109 (2004-03-01), None
patent: 1524556 (2005-04-01), None
patent: 2003-244927 (2003-08-01), None
patent: 2004-079639 (2004-03-01), None
patent: 2005-310808 (2005-11-01), None

Affiliated with

Also associated with

Rating

Exposure apparatus with a stage, driving unit,and force... does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Exposure apparatus with a stage, driving unit,and force..., we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Exposure apparatus with a stage, driving unit,and force... will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-2713877