Thin film tuning-fork type inflection resonator and electric...

Details Thin film tuning-fork type inflection resonator and electric... Thin film tuning-fork type inflection resonator and electric...

2011-03-29

2011-03-29

SanMartin, J. (Department: 2837)

Electrical generator or motor structure

Non-dynamoelectric

Piezoelectric elements and devices

Reexamination Certificate

active

07915793

ABSTRACT:
A compact resonator has a wide bandwidth and a small variation of the specific vibration frequency. The resonator is a thin film tuning-fork type inflection resonator in which a thin film made of a piezoelectric material is formed on a substrate on which a lower electrode is formed, and an upper electrode is formed on the piezoelectric thin film.

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patent: 54092091 (1979-07-01), None
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