Error diffusion-derived sub-resolutional grayscale reticle

Details Error diffusion-derived sub-resolutional grayscale reticle Error diffusion-derived sub-resolutional grayscale reticle

2011-03-01

2011-03-01

Rosasco, Stephen (Department: 1721)

Radiation imagery chemistry: process, composition, or product th

Radiation modifying product or process of making

Radiation mask

C716S030000

Reexamination Certificate

active

07897302

ABSTRACT:
A method is provided for forming an error diffusion-derived sub-resolutional grayscale reticle. The method forms at least one partial-light transmissive layer overlying a transparent substrate. At least one unit cell in formed in the transmissive layer. The unit cell is formed by selecting the number of reduced-transmission pixels in the unit cell, and forming a sub-pattern of reduced-transmission pixels in the unit cell. The unit cell is sub-resolutional at a first wavelength.

REFERENCES:
patent: 5821013 (1998-10-01), Miller et al.
patent: 2006/0200790 (2006-09-01), Shang et al.
patent: 2006/0210891 (2006-09-01), Progler et al.
patent: 2010/0040958 (2010-02-01), Ulrich et al.
Victor Ostromoukhov, “A Simple and Efficient Error-Diffusion Algorithm”, SIGGRAPH 2001.

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