System for processing an object

Details System for processing an object System for processing an object

2011-08-30

2011-08-30

Vanore, David A (Department: 2881)

Radiant energy

Irradiation of objects or material

Ion or electron beam irradiation

C250S306000, C250S310000, C250S397000, C250S398000, C250S493100

Reexamination Certificate

active

08008639

ABSTRACT:
A processing system comprises a gas supply apparatus with which process gas is supplied to an object. An activation beam activates the gas thereby inducing a chemical reaction between material at the surface of the object and the process gas causing ablation of material from the surface or deposition of material at the surface. The gas supply apparatus is formed from a stack of plates providing a gas conduit system between at least one gas inlet and at least one gas outlet.

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