Piezoelectric element and method for manufacturing the same

Details Piezoelectric element and method for manufacturing the same Piezoelectric element and method for manufacturing the same

2011-04-12

2011-04-12

Rosenau, Derek J (Department: 2837)

Electrical generator or motor structure

Non-dynamoelectric

Piezoelectric elements and devices

C310S340000

Reexamination Certificate

active

07923905

ABSTRACT:
A coating film is formed on the whole surface area of a body part. Formation of the coating film may be done by immersing the body part in a solution of parfluoropolyether. Then, the parfluoropolyether constituting the coating film is joined with the side surfaces of the body part by irradiating Xenon excimer laser in a nitrogen atmosphere onto the side faces of the body part, or to the surface exposing an electrode layer. As a result, the protective film is formed only on the side surfaces of the body part. Thus, the protective film is formed as a monomolecular film. Total body part is then cleaned by 2,3-dihydrodecafluoropentane to remove non-reacted coating film, thereby completing a multi-layer piezoelectric element.

REFERENCES:
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patent: 2008/0274570 (2008-11-01), Suzuki et al.
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Thongrueng et al.; “Lifetime and Degradation Mechanism of Multiplayer Ceramic Actuator”, Jpn. J. Appl. Phys., vol. 37, pp. 5306-5310; Sep. 1998.

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