Optics: measuring and testing – Position or displacement
Reexamination Certificate
2011-04-19
2011-04-19
Chowdhury, Tarifur R. (Department: 2886)
Optics: measuring and testing
Position or displacement
C356S370000, C356S237100, C356S237500
Reexamination Certificate
active
07929154
ABSTRACT:
The present invention provides a laser irradiation apparatus and a laser irradiation method which can conduct irradiation of a laser beam accurately by correcting misalignment of an irradiation position of the laser beam from the predetermined position due to temperature change. A laser irradiation apparatus includes a laser oscillator emitting a laser beam; an XY stage provided with an irradiation object; an optical system which shapes the laser beam into a linear beam on a surface of the irradiation object provided on the XY stage; an illumination device which emits light to the surface of the irradiation object; and a camera for imaging reflected light of the light on the surface of the irradiation object, in which misalignment of an irradiation position of the linear beam detected from the reflected light imaged by the camera is corrected.
REFERENCES:
patent: 4970546 (1990-11-01), Suzuki et al.
patent: 5097291 (1992-03-01), Suzuki
patent: 5119390 (1992-06-01), Ohmori
patent: 5140600 (1992-08-01), Rebhan
patent: 5463650 (1995-10-01), Ito et al.
patent: 5473412 (1995-12-01), Ozawa
patent: 5854803 (1998-12-01), Yamazaki et al.
patent: 5999266 (1999-12-01), Takahashi et al.
patent: 6210996 (2001-04-01), Yamazaki et al.
patent: 6468842 (2002-10-01), Yamazaki et al.
patent: 6633376 (2003-10-01), Nishida et al.
patent: 6706570 (2004-03-01), Yamazaki et al.
patent: 6784030 (2004-08-01), Yamazaki et al.
patent: 6861614 (2005-03-01), Tanabe et al.
patent: 7006237 (2006-02-01), Iwata
patent: 7050878 (2006-05-01), Yamazaki et al.
patent: 7397592 (2008-07-01), Tanaka
patent: 2002/0003629 (2002-01-01), Matsui
patent: 2003/0048439 (2003-03-01), Yoshida et al.
patent: 2003/0171837 (2003-09-01), Yamazaki et al.
patent: 2004/0041158 (2004-03-01), Hongo et al.
patent: 2004/0069751 (2004-04-01), Yamazaki et al.
patent: 2004/0105092 (2004-06-01), Iwata
patent: 2005/0036190 (2005-02-01), Tanaka
patent: 2005/0109743 (2005-05-01), Tanabe et al.
patent: 2005/0139582 (2005-06-01), Tanaka
patent: 2005/0214986 (2005-09-01), Tanaka et al.
patent: 2006/0155413 (2006-07-01), Yamazaki et al.
patent: 2006/0227317 (2006-10-01), Henderson et al.
patent: 1 067 593 (2001-01-01), None
patent: 06-291075 (1994-10-01), None
patent: 2000-346618 (2000-12-01), None
patent: 2001-023918 (2001-01-01), None
patent: 2003-224084 (2003-08-01), None
patent: 2005-311327 (2005-11-01), None
Invitation to Pay Additional Fees issued in corresponding PCT Application No. PCT/JP2006/325003; PCT9286 dated Jan. 16, 2007.
Tanaka Koichiro
Yamamoto Yoshiaki
Akanbi Isiaka O
Chowdhury Tarifur R.
Costellia Jeffrey L.
Nixon & Peabody LLP
Semiconductor Energy Laboratory Co,. Ltd.
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