Sensor array for a high temperature pressure transducer...

Details Sensor array for a high temperature pressure transducer... Sensor array for a high temperature pressure transducer...

2011-03-22

2011-03-22

Lee, Kyung (Department: 2833)

Electrical resistors

Strain gauge type

C338S036000, C338S047000, C073S576000, C073S724000

Reexamination Certificate

active

07911316

ABSTRACT:
A sensor array for a pressure transducer having a diaphragm with an active region, and capable of deflecting when a force is applied to the diaphragm. The sensor array disposed on a single substrate, the substrate secured to the diaphragm. The sensor array having a first outer sensor near an edge of the diaphragm at a first location and on the active region, a second outer sensor near an edge of the diaphragm at a second location and on the active region, and at least one center sensor substantially overlying a center of the diaphragm. The sensors connected in a bridge array to provide an output voltage proportional to the force applied to the diaphragm. The sensors dielectrically isolated from the substrate.

REFERENCES:
patent: 5973590 (1999-10-01), Kurtz et al.
patent: 6330829 (2001-12-01), Kurtz et al.
patent: 6595066 (2003-07-01), Kurtz et al.

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