Mask holder for supporting transfer mask

Details Mask holder for supporting transfer mask Mask holder for supporting transfer mask

1998-11-25

2000-12-19

Rosasco, S.

Radiation imagery chemistry: process, composition, or product th

Radiation modifying product or process of making

Radiation mask

378 35, G03F 900

Patent

active

061625663

ABSTRACT:
In a mask holder for supporting a transfer mask which includes a thin-film portion having an aperture pattern forming region and a supporting frame portion for supporting the thin-film portion, the mask holder contacts with the thin-film portion except for the aperture pattern forming region.

REFERENCES:
patent: 4986007 (1991-01-01), Laganza et al.
patent: 5902706 (1999-05-01), Huh

Affiliated with

Also associated with

Rating

Mask holder for supporting transfer mask does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Mask holder for supporting transfer mask, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Mask holder for supporting transfer mask will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-269754