Titania-doped quartz glass for nanoimprint molds

Details Titania-doped quartz glass for nanoimprint molds Titania-doped quartz glass for nanoimprint molds

2011-05-03

2011-05-03

Lorengo, Jerry (Department: 1731)

Compositions: ceramic

Ceramic compositions

Glass compositions, compositions containing glass other than...

C501S055000

Reexamination Certificate

active

07935648

ABSTRACT:
In the nanoimprint lithography, a titania-doped quartz glass having a CTE of −300 to 300 ppb/° C. between 0° C. and 250° C. and a CTE distribution of up to 100 ppb/° C. at 25° C. is suited for use as nanoimprint molds.

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