Optics: measuring and testing – By light interference – For dimensional measurement
Reexamination Certificate
2011-04-26
2011-04-26
Lee, Hwa S. A (Department: 2886)
Optics: measuring and testing
By light interference
For dimensional measurement
Reexamination Certificate
active
07933025
ABSTRACT:
Disclosed is a method that includes combining a first light beam and at least a second light beam to form a combined light beam, introducing a sinusoidal phase shift with a frequency f between a phase of the first light beam and a phase of the second light beam, recording at least one interference signal based on a modulation of the combined light beam in response to the sinusoidal phase shift, where the interference signal includes at least three different frequency components, and outputting the information. For each interference signal, information related to the difference in optical path lengths of the first and second light beam is determined by comparing the intensity of the at least three different frequency components of the interference signal.
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A Lee Hwa S.
Fish & Richardson P.C.
Zygo Corporation
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