Production method for color filter

Details Production method for color filter Production method for color filter

2011-03-29

2011-03-29

Deo, Duy-Vu N (Department: 1713)

Radiation imagery chemistry: process, composition, or product th

Radiation modifying product or process of making

Screen other than for cathode-ray tube

C430S311000, C430S321000

Reexamination Certificate

active

07914957

ABSTRACT:
The present invention provides a production method for a color filter including forming a first colored layer on a support, forming a photoresist layer on the first colored layer, forming an image on the first colored layer by removing the photoresist layer in the form of an image pattern, etching the first colored layer in the form of the image formed in the forming the image by use of a dry etching process that uses a mixed gas in which a fluorine-based gas and oxygen (O2) are mixed at a mixing ratio (fluorine-based gas/O2), by flow rate ratio, in the range of from 2/1 to 8/1, and removing the photoresist layer remaining after the etching.

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European Search Report Dated Jan. 4, 2008.
EP Communication, dated Jul. 2, 2009, issued in corresponding EP Application No. 07016460.3, 4 pages.

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