Method of manufacturing a semiconductor device

Details Method of manufacturing a semiconductor device Method of manufacturing a semiconductor device

2011-07-12

2011-07-12

Banks, Derris H (Department: 3729)

Metal working

Method of mechanical manufacture

Electrical device making

C029S831000, C029S832000, C029S739000, C029S740000

Reexamination Certificate

active

07975376

ABSTRACT:
The invention aims to provide substrate treatment equipment that can automatically collect a substrate in a normal condition without needing manual operation. The equipment includes a substrate holder26for holding substrates12in a multistage manner and a substrate transfer unit34for transferring the substrates12into the substrate holder26, wherein a substrate holding condition of the substrate holder26is sensed by a sensing section60. The sensing section60has photo-sensors64a,64b, and sensing waveforms sensed by the photo-sensors64a,64bare compared with a normal waveform. A control section66is provided, which controls a substrate transfer unit34such that substrates12other than at least a substrate12that was determined to be abnormal are transferred by the unit.

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Office Action in U.S. Appl. No. 10/570,156, issued Dec. 8, 2009.

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