Remote wafer presence detection with passive RFID

Details Remote wafer presence detection with passive RFID Remote wafer presence detection with passive RFID

2011-04-12

2011-04-12

Bugg, George A (Department: 2612)

Communications: electrical

Condition responsive indicating system

Specific condition

C438S480000, C438S506000, C438S514000

Reexamination Certificate

active

07924159

ABSTRACT:
The present invention involves a system and method of remotely detecting the presence of a wafer comprising, a passive RFID circuit, wherein the RFID circuit is attached to an end of a transfer arm located inside a vacuum chamber of an ion implantation system, a reader located outside the vacuum chamber, and wherein the RFID tag provides an indication relating to whether or not a wafer is secured by the transfer arm.

REFERENCES:
patent: 4813732 (1989-03-01), Klem
patent: 6918735 (2005-07-01), Urban et al.
patent: 7135691 (2006-11-01), Vanderpot et al.
patent: 7141809 (2006-11-01), Vanderpot et al.
patent: 2008/0131239 (2008-06-01), Rebstock
patent: 2008/0292432 (2008-11-01), Castantini et al.

Affiliated with

Also associated with

Rating

Remote wafer presence detection with passive RFID does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Remote wafer presence detection with passive RFID, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Remote wafer presence detection with passive RFID will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-2682403