MEMS-based quartz hybrid filters and a method of making the...

Details MEMS-based quartz hybrid filters and a method of making the... MEMS-based quartz hybrid filters and a method of making the...

2011-08-09

2011-08-09

Summons, Barbara (Department: 2817)

Wave transmission lines and networks

Coupling networks

Electromechanical filter

C333S185000

Reexamination Certificate

active

07994877

ABSTRACT:
An integrated Micro-Electro-Mechanical Systems (MEMS) filter includes an insulating substrate bonded to a base substrate such that at least a portion of the insulating substrate is separated from the base substrate by a gap, the insulating substrate having a first side and a second side, an inductive element having a coil, wherein the coil of the inductive element is on the insulating substrate, and a capacitive element having two conductive plates, wherein one of the two conductive plates is on the insulating substrate.

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