Method for producing a tuning-fork type crystal vibrating piece

Details Method for producing a tuning-fork type crystal vibrating piece Method for producing a tuning-fork type crystal vibrating piece

2011-07-12

2011-07-12

Kim, Paul D (Department: 3729)

Metal working

Method of mechanical manufacture

Electrical device making

C029S595000, C029S609100, C216S013000, C216S080000, C216S097000, C310S319000, C310S361000, C310S370000, C331S158000, C331S176000, C430S319000

Reexamination Certificate

active

07975364

ABSTRACT:
A method for producing a tuning-fork type crystal vibrating piece relates to a crystal tuning fork comprising a basal portion, a first vibrating arm, and a second vibrating arm, wherein both arms extend from the basal portion. The method for producing a crystal tuning fork comprises a step of forming a first metallic film into a shape including the contours of the basal portion, the first vibrating arm and second vibrating arm on a first surface of a quartz wafer; a step of forming a second metallic film on the second surface opposite to the first surface of the quartz wafer into a shape covering at least a root area near the basal portion between the first vibrating arm and the second vibrating arm, and a step of wet-etching the quartz substrate in etching solution after forming the first and second metallic films.

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