Microprobe array structure and method for manufacturing the...

Details Microprobe array structure and method for manufacturing the... Microprobe array structure and method for manufacturing the...

2011-05-10

2011-05-10

Cohen, Lee S (Department: 3739)

Surgery

Diagnostic testing

Structure of body-contacting electrode or electrode inserted...

C600S393000

Reexamination Certificate

active

07941201

ABSTRACT:
A microprobe array structure with self-stabilization capability and a method for manufacturing the same are proposed. The microprobe array structure is used to sense various biopotential signals, and is characterized in that the etching parameters are controlled during etching to manufacture a microprobe structure with a reduced bottom cross section so that the microprobe can be firmly stabilized in the skin tissue. Moreover, a conducting layer is formed on the microprobe to sense signals. A design of electric isolation between microprobes is also proposed. The microprobe array can therefore be used for the measurement of various biopotential signals, and can also be used as a stimulus.

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P. Griss, P. Enoksson, H.K. Tolvanen-Laakso, P. Merilainen, S. Ollmar, G. Stemme, “Micromachined Electrodes for Biopotential Measurements”, J. of Microelectromechanical System, vol. 10, No. 1, 2001.

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