Methods and systems for controlling a semiconductor...

Details Methods and systems for controlling a semiconductor... Methods and systems for controlling a semiconductor...

2011-03-01

2011-03-01

Masinick, Michael D (Department: 2128)

Data processing: generic control systems or specific application

Generic control system, apparatus or process

Optimization or adaptive control

C700S112000, C700S116000

Reexamination Certificate

active

07899562

ABSTRACT:
Software for controlling processes in a heterogeneous semiconductor manufacturing environment may include a wafer-centric database, a real-time scheduler using a neural network, and a graphical user interface displaying simulated operation of the system. These features may be employed alone or in combination to offer improved usability and computational efficiency for real time control and monitoring of a semiconductor manufacturing process. More generally, these techniques may be usefully employed in a variety of real time control systems, particularly systems requiring complex scheduling decisions or heterogeneous systems constructed of hardware from numerous independent vendors.

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