Micromachine and production method thereof

Details Micromachine and production method thereof Micromachine and production method thereof

2011-01-25

2011-01-25

Smith, Zandra (Department: 2822)

Active solid-state devices (e.g., transistors, solid-state diode

Responsive to non-electrical signal

C257S415000, C257S254000

Reexamination Certificate

active

07875940

ABSTRACT:
A micromachine for a high-frequency filter which has a high Q value and a higher frequency band is provided. The micromachine includes an electrode provided on a substrate, an inter-layer insulation film composed of a first insulation film and a second insulation film which are provided on the substrate in the state of covering the electrode, a hole pattern provided in the second insulation film in the state of reaching the electrode, and a belt-like vibrator electrode provided on the second insulation film so as to cross the upper side of a space portion constituted of the inside of the hole pattern.

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Communication enclosing Search Report for European Application No. 03784618.5-2203 dated Aug. 9, 2007.
Japanese Application No. 2002-232324 issued Sep. 4, 2006 Office Action.

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