Exposure apparatus and device manufacturing method

Details Exposure apparatus and device manufacturing method Exposure apparatus and device manufacturing method

2011-08-30

2011-08-30

Nguyen, Hung Henry (Department: 2882)

Photocopying

Projection printing and copying cameras

Step and repeat

Reexamination Certificate

active

08009273

ABSTRACT:
This invention provides an exposure apparatus configured to expose a pattern of an original on a substrate through a projection optical system. The apparatus comprises a holding unit configured to hold the projection optical system, at least three anti-vibration mounts configured to support the holding unit, and at least three supporting members configured to support the at least three anti-vibration mounts respectively. The at least three supporting members are independent of each other without connecting to each other.

REFERENCES:
patent: 6493062 (2002-12-01), Tokuda et al.
patent: 6741328 (2004-05-01), Yonekawa et al.
patent: 6853443 (2005-02-01), Nishi
patent: 6885431 (2005-04-01), Hara
patent: 11-297587 (1999-10-01), None

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