Piezoelctric actuator, method of manufacturing same, and...

Details Piezoelctric actuator, method of manufacturing same, and... Piezoelctric actuator, method of manufacturing same, and...

2011-08-23

2011-08-23

Budd, Mark (Department: 2837)

Electrical generator or motor structure

Non-dynamoelectric

Piezoelectric elements and devices

C310S324000, C310S358000

Reexamination Certificate

active

08004159

ABSTRACT:
The piezoelectric actuator comprises: a supporting substrate; a thermal stress controlling layer which is formed on the supporting substrate; and a piezoelectric body which is formed as a film onto the thermal stress controlling layer on the supporting substrate at a higher temperature than room temperature, wherein the thermal stress controlling layer reduces a film stress induced by formation of the piezoelectric body.

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Office Action JP-2004-351209 dated Jun. 21, 2011with Engish Translation.

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