Slab type laser apparatus

Details Slab type laser apparatus Slab type laser apparatus

2011-03-08

2011-03-08

Nguyen, Dung T (Department: 2828)

Coherent light generators

Particular active media

Gas

C372S050220, C372S057000, C372S069000, C372S087000, C372S092000, C372S106000

Reexamination Certificate

active

07903715

ABSTRACT:
A slab type laser apparatus has a slab type gas laser medium part formed in a region defined by a pair of electrode flat plates oppositely disposed in parallel with each other in a space to be filled with a gas laser medium which is excited by high-frequency electric power. The apparatus includes an oscillator part including a pair of resonator mirrors oppositely disposed with a part of the gas laser medium part in between, and for amplifying a laser beam to have predetermined light intensity to emit the laser beam, and the amplifier part including a plurality of return mirrors oppositely disposed with a part of the gas laser medium part in between. The incident laser beam goes and returns plural times between the return mirrors, and the laser beam is amplified to have predetermined power.

REFERENCES:
patent: 7317196 (2008-01-01), Partlo et al.
patent: 2004/0179571 (2004-09-01), Govorkov et al.
patent: 2007/0115535 (2007-05-01), Govorkov et al.
patent: 2009-26854 (2009-02-01), None
Tatsuya Ariga et al., “Extreme Ultraviolet Rays(EUV)Lithography Light Source CO2Laser”, O plus E, New Technology Communications, vol. 28, No. 12, Dec. 2004, pp. 1263-1267.

Affiliated with

Also associated with

Rating

Slab type laser apparatus does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Slab type laser apparatus, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Slab type laser apparatus will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-2660904