Method of manufacturing a CPP structure with enhanced GMR ratio

Metal working – Method of mechanical manufacture – Electrical device making

Reexamination Certificate

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C029S603130, C029S603140, C360S324120, C428S812000, C204S192110

Reexamination Certificate

active

07918014

ABSTRACT:
A CPP-GMR spin valve having a CoFe/NiFe composite free layer is disclosed in which Fe content of the CoFe layer ranges from 20 to 70 atomic % and Ni content in the NiFe layer varies from 85 to 100 atomic % to maintain low Hc and λSvalues. A small positive magnetostriction value in a Co75Fe25layer is used to offset a negative magnetostriction value in a Ni90Fe10layer. The CoFe layer is deposited on a sensor stack in which a seed layer, AFM layer, pinned layer, and non-magnetic spacer layer are sequentially formed on a substrate. After a NiFe layer and capping layer are sequentially deposited on the CoFe layer, the sensor stack is patterned to give a sensor element with top and bottom surfaces and a sidewall connecting the top and bottom surfaces. Thereafter, a dielectric layer is formed adjacent to the sidewalls.

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