Optics: measuring and testing – Inspection of flaws or impurities
Reexamination Certificate
2011-03-01
2011-03-01
Stafira, Michael P (Department: 2886)
Optics: measuring and testing
Inspection of flaws or impurities
C356S237200
Reexamination Certificate
active
07898650
ABSTRACT:
An inspection method of transparent articles wherein presence or absence of optical inhomogeneities within the transparent articles can be accurately inspected is provided.In an inspection method of transparent articles used in photolithography, for inspecting whether or not there are inhomogeneities within transparent articles (4) formed of transparent material wherein optical properties regionally or locally change with regard to exposure light (specifically, interior defects16), inspection light having a wavelength of 200 nm or shorter is introduced to the transparent article, and light (15) having a longer wavelength than the inspection light which is regionally or locally emitted is sensed on the optical path over which the inspection light is propagated within the transparent article, thereby detecting presence or absence of optical inhomogeneities within the transparent article.
REFERENCES:
patent: 6555273 (2003-04-01), Tanabe
patent: 6610994 (2003-08-01), Tanabe
patent: 7136159 (2006-11-01), Tsai et al.
patent: 7292346 (2007-11-01), De Groot et al.
patent: 7345771 (2008-03-01), Hill
patent: 2001/0044052 (2001-11-01), Tanabe
patent: 3221848 (1991-09-01), None
patent: 831723 (1996-02-01), None
patent: 8261953 (1996-10-01), None
patent: 8333125 (1996-12-01), None
patent: 11264798 (1999-09-01), None
patent: 200381654 (2003-03-01), None
patent: 200529452 (2005-02-01), None
Chinese Office Action corresponding to Chinese Patent Application No. 200680005281.3 dated Sep. 25, 2009.
Chinese Office Action dated Jul. 2, 2010 from corresponding Chinese Patent Application No. 200680005281.3 with translation of relevant part of Office Action.
Hoya Corporation
Stafira Michael P
Sughrue & Mion, PLLC
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