Product-related feedback for process control

Details Product-related feedback for process control Product-related feedback for process control

2011-07-05

2011-07-05

Jarrett, Ryan A (Department: 2121)

Data processing: generic control systems or specific application

Specific application, apparatus or process

Product assembly or manufacturing

C700S121000

Reexamination Certificate

active

07974724

ABSTRACT:
A method, apparatus, and a system for performing a product feedback for process control are provided. Metrology data relating to a first workpiece is received. An end of line parameter relating to the first workpiece is received. The end of line parameter is correlated with the metrology data. A process control associated with a plurality of processes to be performed on a second workpiece is adjusted based upon the correlating.

REFERENCES:
patent: 5319570 (1994-06-01), Davidson et al.
patent: 6947803 (2005-09-01), Bode et al.
patent: 7650199 (2010-01-01), Kadosh
patent: 7797073 (2010-09-01), Pasadyn et al.

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