Cleaning method, cleaning apparatus and electro optical device

Cleaning and liquid contact with solids – Processes – Using sequentially applied treating agents

Reissue Patent

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Details

C134S001000, C134S002000, C134S022100, C134S022140, C134S022190, C134S034000, C134S036000, C134S042000, C134S902000, C510S175000, C438S745000

Reissue Patent

active

RE042248

ABSTRACT:
A cleaning apparatus of organic substances attached to a vapor-deposition mask for low molecular weight organic EL devices comprises a first stage for treating a vapor-deposition mask with a derivative of pyrrolidone, a second stage for rinsing the vapor-deposition mask with water, and a third stage for rinsing the vapor-deposition mask with flowing water. The cleaning apparatus also comprises a fourth stage for treating the vapor-deposition mask with ethanol, a fifth stage for drying the vapor-deposition mask, and a carrying means that carries the vapor-deposition mask to each stage in sequence. It is desirable to adopt N-methyl-2-pyrrolidone as the derivative of pyrrolidone.

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