Active solid-state devices (e.g. – transistors – solid-state diode – Physical configuration of semiconductor
Reexamination Certificate
2011-02-08
2011-02-08
Ngo, Ngan (Department: 2893)
Active solid-state devices (e.g., transistors, solid-state diode
Physical configuration of semiconductor
C257S623000, C257SE29106, C257SE29108
Reexamination Certificate
active
07884446
ABSTRACT:
The present invention generally provides semiconductor substrates having submicron-sized surface features generated by irradiating the surface with ultra short laser pulses. In one aspect, a method of processing a semiconductor substrate is disclosed that includes placing at least a portion of a surface of the substrate in contact with a fluid, and exposing that surface portion to one or more femtosecond pulses so as to modify the topography of that portion. The modification can include, e.g., generating a plurality of submicron-sized spikes in an upper layer of the surface.
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Carey et al., “High Sensitivity Silicon-Based VIS/NIR Photodetectors”, Optical Society of America 2003.
Carey et al., “Femtosecond Laser-Assisted Microstructuring of Silicon for Novel Detector, Sensing and Display Technologies”, LEOS Oct. 26, 2003 (Tuscon, AR, 2003) 481-482.
Carey et al., “Femtosecond Laser-Assisted Microstructuring of Silicon for Novel Detector, Sensing and Display Technologies”, LEOS 2002 (Glasgow, Scotland, 2002) 97-98.
Carey et al., “Femtosecond-Laser-Assisted Microstructuring of Silicon Surfaces”, Optics and Photonics News, 14, 32-36 (2003).
Crouch et al., “Infrared Absorption by Sulfur-Doped Silicon Formed by Femtosecond Laser Irradiation”, Appl. Phys. A, 79, 1635-1641 (2004).
Crouch et al., “Comparison of Structure and Properties of Femtosecond and Nanosecond Laser-Structured Silicon”, Appl. Phys. Lett., 84, 1850-1852 (2004).
Dolgaev et al., “Formation of Conical Microstructures Upon Laser Evaporation of Solids”, Appl. Phys. A, 73, 177-181 (2001).
Fowlkes et al., “Surface Microstructuring and Long-Range Ordering of Silicon Nanoparticles”, Appl. Phys. Lett., 80 (20), 3799-3801 (2002).
Her et al., “Novel Conical Microstructures Created in Silicon With Femtosecond Laser Pulses”, CLEO 1998 (San Francisco, CA 1998) 511-512.
Hu et al., “Solar Cells from Basic to Advanced Systems,” McGraw Hill Book Co., NY 1983, p. 39.
Pedraza et al., “Surface Nonstructuring of Silicon”, Appl Phys. A, 77, 277-284 (2003).
Pedraza et al., “Silicon Microcolumn Arrays Grown by Nanosecond Pulsed-Excimer Laser Irradiation”, Appl. Phys. Lett., 74 (16), 2322-2324 (1999).
Sanchez et al., “Dynamics of the Hydrodynamical Growth of Columns on Silicon Exposed to ArF Excimer-Laser Irradiation”, Appl. Phys. A, 66, 83-86 (1998).
Sanchez et al., “Whiskerlike Structure Growth on Silicon Exposed to Arf Excimer Laser Irradiation”, Appl. Phys. Lett., 69 (5), 620-622 (1996).
Serpenguzel et al., “Temperature Dependence of Photoluminescence in Non-Crystalline Silicon”, Photonics West (San Jose, CA 2004) 454-462.
Shen et al., “Formation of Regular Arrays of Silicon Microspikes by Femtosecond Laser Irradiation Through a Mask”, Appl. Phys. Lett., 82, 1715-1717 (2003).
Solar Energy Research Institute, “Basic Photovoltaic Principles and Methods,” Van Nostrand Reinhold Co., NY 1984, pp. 45-47 and 138-142.
Younkin et al., “Infrared Absorption by Conical Silicon Microstructures Made in a Variety of Background Gases Using Femtosecond-Laser Pulses”, J. Appl. Phys., 93, 2626-2629 (2003).
Wu et al. “Visible Luminescence From Silicon Surfaces Microstructured in Air”, Appl Phys. Lett., 81, 1999-2001 (2002).
Wu, C. et al., “
Mazur Eric
Shen Mengyan
Engellenner Thomas J.
Mollaaghababa Reza
Ngo Ngan
Nutter & McClennen & Fish LLP
President & Fellows of Harvard College
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