Membrane grating for beam steering device and method of...

Details Membrane grating for beam steering device and method of... Membrane grating for beam steering device and method of...

2011-08-02

2011-08-02

Lebentritt, Michael (Department: 2829)

Semiconductor device manufacturing: process

Making device or circuit responsive to nonelectrical signal

Responsive to corpuscular radiation

C257SE31121

Reexamination Certificate

active

07989250

ABSTRACT:
A method of fabricating a membrane structure for a diffractive phased array assembly is provided. The method includes the steps of providing a wafer having a body and at least a membrane layer and a backside layer disposed on opposite faces of the body, forming a grating pattern on a surface of the membrane layer, and forming a window through the wafer to expose a back surface of the membrane, thereby allowing light to pass through the membrane.

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European Search Report mailed Feb. 13, 2009.

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