Measurement apparatus, exposure apparatus, and device...

Details Measurement apparatus, exposure apparatus, and device... Measurement apparatus, exposure apparatus, and device...

2011-03-22

2011-03-22

Nguyen, Hung Henry (Department: 2882)

Photocopying

Projection printing and copying cameras

Illumination systems or details

C355S053000

Reexamination Certificate

active

07911585

ABSTRACT:
A measurement apparatus configured to measure a light intensity distribution in a plane to be measured includes a mask including an opening having a dimension smaller than a wavelength of light for forming the light intensity distribution, and a light-shielding portion being configured to substantially shield the light; a first photoelectric conversion element configured to receive the light passing through the opening and output a light intensity signal; and a second photoelectric conversion element arranged at a position apart from the first photoelectric conversion element, and configured to receive the light transmitted through the light-shielding portion and output a light intensity signal. The mask, and the first and second photoelectric conversion elements are moved along the plane to be measured. The light intensity distribution in the plane to be measured is calculated on the basis of the light intensity signals respectively output from the first and second photoelectric conversion elements.

REFERENCES:
patent: 5631731 (1997-05-01), Sogard
patent: 6850327 (2005-02-01), Taniguchi et al.
patent: 7233874 (2007-06-01), Ye et al.
patent: 7791718 (2010-09-01), Hagiwara
William N. Partlo, Charles H. Fields and William G. Oldham, “Direct aerial image measurement as a method of testing high numerical aperture monolithographic lenses”, J. Vac. Sci. Technol. B, vol. 11 (1993) pp. 2686-2691.

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