Polymer and chemically amplified resist composition...

Details Polymer and chemically amplified resist composition... Polymer and chemically amplified resist composition...

2011-07-19

2011-07-19

Teskin, Fred M (Department: 1762)

Synthetic resins or natural rubbers -- part of the class 520 ser

Synthetic resins

Polymers from only ethylenic monomers or processes of...

C526S282000, C525S327200, C430S270100

Reexamination Certificate

active

07981985

ABSTRACT:
The present invention provides a polymer containing a structural unit represented by the formula (Ia) or (Ib):wherein R1, R2, R3, n, Z1, R4, R5and m are defined in the specification, a structural unit represented by the formula (II):wherein R6, R7, R8, R9, Z2, n′ and Z′ are defined in the specification, and a structural unit represented by the formula (III):wherein R10, R11, 1′ and Z3are defined in the specification.

REFERENCES:
patent: 6239231 (2001-05-01), Fujishima et al.
patent: 2005/0100819 (2005-05-01), Fuji et al.
patent: 2009/0142696 (2009-06-01), Furuya et al.

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