Bispectral detection device and bispectral detector...

Radiant energy – Infrared-to-visible imaging – Including detector array

Reexamination Certificate

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C250S330000, C250S338100, C250S353000

Reexamination Certificate

active

07943904

ABSTRACT:
The present invention relates to a bispectral detection device, particularly of an infrared radiation and a visible radiation, including a monolithic substrate; an array of bolometric micro-bridges sensitive to infrared radiation, the bolometric micro-bridges being suspended over a first face of the substrate by means of support and connection arms; and an array of photoelectric elements fowled in the substrate, and sensitive to visible radiation, the bolometric micro-bridges and the photoelectric elements being stacked. According to the invention, the substrate portion between the photoelectric element array and a second face of the substrate, opposite to the first face thereof, is thinned so that the photoelectric elements are capable of detecting a visible radiation incident on the second face.

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A. Mens et al., “X-UV Imaging With Backside Illuminated CCDs in Laser-Matter Interaction Experiments,” J. Optics (Paris), 1993, vol. 24, No. 3, pp. 129-134.
Reich, Robert K., “Sub-Poisson Statistics Observed in an Electronically Shuttered and Back-Illuminated CCD Pixel,” IEEE Transactions on Electron Devices, vol. 44, No. 1, Jan. 1997, pp. 69-73.

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