Processing apparatus for processing object in vessel

Details Processing apparatus for processing object in vessel Processing apparatus for processing object in vessel

2011-07-12

2011-07-12

Glick, Edward J (Department: 2882)

Photocopying

Projection printing and copying cameras

Step and repeat

C355S030000

Reexamination Certificate

active

07978304

ABSTRACT:
An apparatus for processing an object includes a vessel which forms a pressure-reduced inner space and accommodates the object, a member which is supported by an inner side of the vessel through a heat insulator, and a temperature adjusting portion which adjusts a temperature of the member.

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