Method of reducing contamination by providing a removable...

Details Method of reducing contamination by providing a removable... Method of reducing contamination by providing a removable...

2011-06-07

2011-06-07

Richards, N Drew (Department: 2895)

Semiconductor device manufacturing: process

Coating with electrically or thermally conductive material

C438S017000, C438S759000, C257SE21487, C257SE21521

Reexamination Certificate

active

07955962

ABSTRACT:
By providing a protective layer in an intermediate manufacturing stage, an increased surface protection with respect to particle contamination and surface corrosion may be achieved. In some illustrative embodiments, the protective layer may be used during an electrical test procedure, in which respective contact portions are contacted through the protective layer, thereby significantly reducing particle contamination during a respective measurement process.

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