Solid-state imaging device having improved light sensitivity...

Details Solid-state imaging device having improved light sensitivity... Solid-state imaging device having improved light sensitivity...

2011-04-19

2011-04-19

Villecco, John M (Department: 2622)

Television

Camera, system and detail

Solid-state image sensor

C348S308000, C438S595000, C438S639000

Reexamination Certificate

active

07929036

ABSTRACT:
To provide a method for producing a solid-state imaging device enabling an improvement of a light sensitivity characteristic in a light receiving unit, a solid-state imaging device in which the light sensitivity characteristic is improved, and a camera provided with the solid-state imaging device. A shield film projected around the light receiving unit is formed on a substrate in which the light receiving unit is formed; an transparent insulation film is formed on the shield film; a sidewall insulation film is formed by etch-back of the insulation film, in a side wall of the shield film; a mask layer having an aperture at a position corresponding to the light receiving unit is formed on the shield film; and the shield film is etched by using the sidewall insulation film and the mask layer as a mask to form an aperture portion exposing the light receiving unit.

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patent: 2006/0061674 (2006-03-01), Iida et al.
patent: 2006/0166389 (2006-07-01), Miyamoto et al.

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