Mirror device with an anti-stiction layer

Details Mirror device with an anti-stiction layer Mirror device with an anti-stiction layer

2011-05-17

2011-05-17

Mack, Ricky L (Department: 2873)

Optical: systems and elements

Optical modulator

Light wave temporal modulation

C359S291000, C359S292000

Reexamination Certificate

active

07944600

ABSTRACT:
A micromirror device includes an elastic hinge for supporting a mirror on a substrate, and an address electrode for deflecting the mirror. The device further includes a protective layer and an oriented monolayer laid to cover a stopper also functioning as an address electrode provided below the mirror and between the mirror and the substrate.

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