Laser interferometer

Details Laser interferometer Laser interferometer

2011-01-25

2011-01-25

Chowdhury, Tarifur (Department: 2886)

Optics: measuring and testing

By light interference

Having light beams of different frequencies

C356S498000

Reexamination Certificate

active

07876449

ABSTRACT:
A laser interferometer includes: a laser source for emitting a laser beam while stabilizing a center wavelength of the laser beam by modulating the laser beam using a modulation signal of a predetermined frequency; and a reference mirror and a measurement mirror for reflecting the laser beam. The laser interferometer further includes: a sampling unit for acquiring a sampling value by sampling interference light reflected by the reference mirror and the measurement mirror with a sampling frequency that is a multiple by an integer of two or more of a frequency of the modulation signal; and an average calculator for calculating an average value by averaging a time-series sampling value acquired by the sampling unit in accordance with the sampling frequency. The laser interferometer calculates a displacement of the measurement mirror based on the average value calculated by the average calculator.

REFERENCES:
patent: 2007/0008995 (2007-01-01), Oozeki et al.
patent: A-2-22503 (1990-01-01), None
patent: A-2001-274495 (2001-10-01), None

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