Stage apparatus and exposure apparatus

Details Stage apparatus and exposure apparatus Stage apparatus and exposure apparatus

2011-07-05

2011-07-05

Nguyen, Hung Henry (Department: 2882)

Photocopying

Projection printing and copying cameras

Detailed holder for photosensitive paper

C355S030000, C355S053000, C310S012060

Reexamination Certificate

active

07973910

ABSTRACT:
A stage apparatus includes: a moving stage, which moves along a movement plane; a first moving table, which holds a specimen while being able to move with respect to the moving stage; and a second moving table, which is provided on the moving stage and, when the first moving table has moved from a first position to a second position, is positioned at the first position.

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Japanese Notice of Reasons for Rejection for Application No. 2004-286889, dated Oct. 5, 2010 w/English translation.
Office Action issued in JP Application No. 2004-286889 on Apr. 20, 2010 (with English translation).

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