Corrosion resistant multilayer member

Details Corrosion resistant multilayer member Corrosion resistant multilayer member

2011-06-28

2011-06-28

Speer, Timothy M (Department: 1784)

Stock material or miscellaneous articles

Composite

Of metal

C428S472000, C428S696000, C428S701000, C428S702000

Reexamination Certificate

active

07968205

ABSTRACT:
A corrosion resistant member to be exposed to a halogen-containing gas atmosphere or a halogen-containing gas plasma atmosphere, comprising a substrate and a plurality of layers deposited thereon including a layer of rare earth fluoride providing the outermost surface and a layer of rare earth oxide having a porosity of less than 5% underlying the rare earth fluoride layer.

REFERENCES:
patent: 2003/0181065 (2003-09-01), O'Donnell
patent: 2004/0053081 (2004-03-01), Sakurai et al.
patent: 2005/0037193 (2005-02-01), Sun et al.
patent: 1 013 623 (2000-06-01), None
patent: 10-45461 (1998-02-01), None
patent: 11-080925 (1999-03-01), None
patent: 2002-241971 (2002-08-01), None
patent: 2002-293630 (2002-10-01), None
patent: 2002-363725 (2002-12-01), None
patent: 2004-059397 (2004-02-01), None
European Search Report dated Mar. 21, 2007 issued in corresponding European Application No. EP 06 25 5418.
Japanese Office Action dated Sep. 22, 2010, issued in corresponding Japanese Patent Application No. 2006-281247.

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