Electric lamp and discharge devices – With luminescent solid or liquid material – Vacuum-type tube
Patent
1998-02-23
2000-05-16
Patel, Ashok
Electric lamp and discharge devices
With luminescent solid or liquid material
Vacuum-type tube
313495, 313309, 313336, 313351, H01J 1900
Patent
active
060641495
ABSTRACT:
A field emission device having a gate electrode structure in which a nanocrystalline or microcrystalline silicon layer is positioned over a silicon dioxide dielectric layer. Also disclosed are methods for forming the field emission device. The nanocrystalline or microcrystalline silicon layer forms a bond with the dielectric layer that is sufficiently strong to prevent delamination during a chemical-mechanical planarization operation that is conducted during formation of the field emission device. The nanocrystalline or microcrystalline silicon layer is deposited by PECVD in an atmosphere that contains silane and hydrogen at a ratio in a range from about 1:15 to about 1:40. Multiple field emission devices may be formed and included in a flat panel display for computer monitors telecommunications devices, and the like.
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Micro)n Technology, Inc.
Patel Ashok
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