Specular-surface body

Details Specular-surface body Specular-surface body

1998-01-16

2000-05-16

Speer, Timothy

Stock material or miscellaneous articles

Composite

Of inorganic material

428446, 4289122, 359883, B32B 900

Patent

active

060635134

ABSTRACT:
A specular-surface body (1) which has a sufficient resistance against irradiation of high energy beams--such as X-rays, SOR beams, laser beams, etc.--can be suitably used as reflecting mirrors, diffraction gratings, etc. for such high energy beams. The specular-surface body is formed by a silicon carbide film (3) being formed by chemical vapor deposition on a surface of a substrate (2) of silicon carbide sintered material, the film surface then being processed to be a specular surface (3a). There is a defect-free crystal layer (3b) at a depth d of 300 .ANG. from the specular surface (3a) of the silicon carbide film 3. The silicon carbide film (3) has a crystal structure strongly oriented to one crystal plane (for example, the (220) plane) specified by Miller indices in such a manner that its X-ray diffraction intensity ratio becomes 90% or more at a peak intensity.

REFERENCES:
patent: 5071596 (1991-12-01), Goela et al.
patent: 5106687 (1992-04-01), Tanino et al.
patent: 5363238 (1994-11-01), Akune et al.
patent: 5374412 (1994-12-01), Pickering et al.
patent: 5406906 (1995-04-01), Rimai et al.
patent: 5407750 (1995-04-01), Knioshita et al.
patent: 5448418 (1995-09-01), Hotate et al.

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