Wavelength scanning interferometry and interferometer employing

Optics: measuring and testing – By particle light scattering – With photocell detection

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356360, G01B 902

Patent

active

047596287

ABSTRACT:
In an interferometry wherein a light beam from a light source is divided in two, one of which is used as a reference beam and the other beam is used as an inspecting beam, and the two beams are projected again on an identical plane so as to form an interference pattern; a wavelength scanning type laser diode interferometry characterized in that a laser diode is employed as the light source, and that an injection current of the laser diode is modulated thereby to scan a wavelength of the laser diode and to change an intensity distribution of the interference pattern.

REFERENCES:
patent: 3635562 (1972-01-01), Catherin
patent: 4594003 (1986-06-01), Sommargren

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