Substrate transport apparatus with angled arms

Details Substrate transport apparatus with angled arms Substrate transport apparatus with angled arms

1997-01-21

2001-05-15

Underwood, Donald W. (Department: 3652)

Material or article handling

Horizontally swinging load support

Swinging about pivot

C074S490010, C414S937000, C901S015000

Reexamination Certificate

active

06231297

ABSTRACT:

BACKGROUND OF THE INVENTION
1. Field of the Invention
This invention relates to a substrate transport apparatus, and, more specifically, to an apparatus with multiple substrate holders and angled arms.
2. Prior Art
U.S. Pat. No. 4,951,601 discloses a substrate processing apparatus with multiple processing chambers and a substrate transport apparatus. U.S. Pat. No. 5,180,276 discloses a substrate transport apparatus with two substrate holders. U.S. Pat. No. 5,270,600 discloses a coaxial drive shaft assembly of a substrate transport apparatus.
SUMMARY OF THE INVENTION
In accordance with one embodiment of the present invention, a substrate transport apparatus is provided comprising a drive, a movable arm assembly, and two substrate holders. The movable arm assembly has a pair of proximal arms connected to the drive for rotation about an axis of rotation. Each proximal arm has at least two arm sections that are angled relative to the each other at an angle of less than 180°. The two substrate holders are connected to a different pair of ends of the pair of proximal arms.
In accordance with another embodiment of the present invention, a substrate transport apparatus is provided comprising a coaxial drive shaft assembly and a movable arm assembly. The coaxial drive shaft assembly has a first drive shaft and a second drive shaft. The movable arm assembly has four proximal arm sections fixedly connected to the coaxial drive shaft assembly. The four proximal arm sections, with their connection to the shaft assembly, form two rigid generally V-shaped arms. The two V-shaped arms are rotatable by the coaxial drive shaft assembly about an angle forming their general V-shape. Each of the proximal arm sections extends from the shaft assembly at a different height of the shaft assembly. First and third ones of the proximal arm sections form a first one of the general V-shaped arms and are fixedly connected to the first drive shaft. Second and fourth ones of the proximal arm sections form a second one of the general V-shaped arms and are fixedly connected to the second drive shaft.
In accordance with another embodiment of the present invention, a substrate transport apparatus is provided comprising a drive assembly, a movable arm assembly mounted to the drive assembly, and at least two substrate holders connected to the movable arm assembly. The movable arm assembly comprises arm sections connected to the drive assembly that form two generally wide V-shaped arms with a common axis of rotation proximate an angle in each of the V-shaped arms that form their general V-shape.


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