Patent
1979-06-19
1982-07-20
James, Andrew J.
357 13, 357 81, 357 52, H01L 2906, H01L 2990, H01L 2302
Patent
active
043409008
ABSTRACT:
An oxide passivated mesa epitaxial diode with an integral heat sink, and a process by which it may be fabricated. The passivation layer of highly pure thermally grown SiO.sub.2 is formed over the mesa walls in the region of the pn junction without causing a reaction between the contact metals and their surroundings during the high temperature environment imposed during thermal growth. The heat sink is deposited after the SiO.sub.2 passivation has been grown, replacing a polycrystalline silicon layer beneath the mesa formation which was used as a temporary structural support. Dopant, to form the pn junction, is introduced into the silicon wafer after the formation of the passivation layer but before the heat sink is deposited.
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James Andrew J.
Kundert Thomas L.
Singer Donald J.
The United States of America as represented by the Secretary of
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