Substrate conveying device and substrate conveying method

Details Substrate conveying device and substrate conveying method Substrate conveying device and substrate conveying method

1998-05-13

2000-05-16

Warden, Jill

Cleaning and liquid contact with solids

Apparatus

With means to movably mount or movably support the work or...

134133, 134902, 294 641, B08B 300

Patent

active

060622415

ABSTRACT:
According to the present invention, there is provided a substrate conveying device for loading/unloading a substrate to/from a processing section, including an arm for holding the substrate, an arm drive mechanism for driving the arm such as to load/unload the substrate to/from the processing section, a first suction pad provided on the arm, for suctioning the substrate, a second suction pad provided on the arm at a position adjacent to that of the first suction pad, for suctioning the substrate, and a projecting member provided between the first and second suction pads of the arm, so as to control a posture of the substrate to be suctioned one of the first and second suction pads as the projecting member abuts the lower surface of the substrate.

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