Enhanced beam splitter assembly

Details Enhanced beam splitter assembly Enhanced beam splitter assembly

1997-12-03

1999-05-11

Epps, Georgia

Optical: systems and elements

Single channel simultaneously to or from plural channels

By partial reflection at beam splitting or combining surface

356437, G02B27/14

Patent

active

059033940

ABSTRACT:
Measurement accuracy provided by an optical system that uses a beam splitter is maintained, by containing the beam splitter inside a housing and supplying a dry purge gas to the interior of the housing in the region of the beam splitter while the beam splitter acts on a light source of the optical system. Also, certain portions of the beam splitter where an adhesive mounting compound is applied, are masked from the light source thus avoiding contamination of the beam splitter and degradation in measurement performance of the optical system.

REFERENCES:
patent: 4966462 (1990-10-01), Novick
patent: 5055696 (1991-10-01), Haraichi et al.
MacBride et al., Effect of Temperature Variation of FT-IR Spectrometer Stability, Applied Spectroscopy, vol. 51, No. 1, pp. 43-50, Jan. 1997.
Nanometrics Operations Manual, Model 210 UV, p. 2-2.
Nanometrics Simplified drawing of Model 4000.

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