Radiant energy – Photocells; circuits and apparatus – Optical or pre-photocell system
Reexamination Certificate
1999-07-07
2001-05-29
Allen, Stephone B. (Department: 2878)
Radiant energy
Photocells; circuits and apparatus
Optical or pre-photocell system
C250S227110, C073S105000, C356S370000
Reexamination Certificate
active
06239426
ABSTRACT:
BACKGROUND OF THE INVENTION
This invention relates to a scanning atomic force microscope and scanning proximity field optical microscope for observing microscopic surface geometry or physical information, and to a memory device used to perform data recording and reading out.
Conventionally, in the probe microscope the detection of displacement using the action of a force between a probe and a sample has been an important technology in conducting distance control between the probe and the sample. Among the conventional distance control means are an optical lever method or an optical interference method using light, and further a self-detection type probe using a piezoelectric element is known, and so on.
The conventional optical lever method or optical interference method required a positioning mechanism to align an optical axis with the probe, together with difficultly in optical axis adjustment operation. There has been a problem in that the self-detection type probe using a piezoelectric element was complicated in the probe manufacture process. Furthermore, there has been a demand for a probe having a higher resonant frequency in order to carry out scanning at high speed.
SUMMARY OF THE INVENTION
It is an object of the present invention to provide a scanning probe which does not require optical axis alignment but is easy to use and high in resonant frequency, an atomic force microscope and scanning proximity field optical microscope which is easy to use and capable of high speed scanning, and a memory device which is easy to adjust and capable of high speed reading in.
As a scanning probe easy to use and high in scanning speed, a scanning probe was devised comprising: a cantilever probe; and a waveguide provided in proximity thereto; wherein a base portion of a cantilever or the cantilever itself is elastically deflectable to enable the cantilever to dynamically displace; the waveguide having an end surface positioned perpendicularly to a direction of displacement of the cantilever probe and at a distance not to prevent the displacement of the cantilever; and the cantilever probe and the optical waveguide being integrally formed on a common base member.
Furthermore, a scanning probe microscope was devised which is structured by at least this probe, an optical interference detecting means, a relative moving means between the probe and the sample, and a control and data processing means.
Also, a memory device was devised which is structured by at least this probe, a recording media, an optical interference detecting means, a relative moving means between the probe and the recording media, and a control and data processing means.
REFERENCES:
patent: 5294790 (1994-03-01), Ohta et al.
patent: 5324935 (1994-06-01), Yasutake
patent: 5394741 (1995-03-01), Kajimura et al.
patent: 5559330 (1996-09-01), Murashita
patent: 5969821 (1999-10-01), Muramatsu et al.
Honma Katsunori
Muramatsu Hiroshi
Adams & Wilks
Allen Stephone B.
Seiko Instruments Inc.
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