Electrical generator or motor structure – Non-dynamoelectric – Piezoelectric elements and devices
Patent
1995-07-06
1998-10-20
Budd, Mark O.
Electrical generator or motor structure
Non-dynamoelectric
Piezoelectric elements and devices
29 2535, 310330, 347 68, H01L 4108
Patent
active
058251219
ABSTRACT:
The thin film piezoelectric device which has excellent properties is disclosed. A thin film piezoelectric device according to the present invention comprises a piezoelectric film which is polycrystalline, and two electrodes by which the piezoelectric film is sandwiched, wherein the size of crystal grains of the piezoelectric film substance is 0.4 .mu.m or more and equal to or less than the thickness of the piezoelectric film. A process for producing the thin film piezoelectric device are also disclosed. The process comprising the steps of: forming the precursor film of a piezoelectric film on an electrode, first heating the electrode at a temperature of 500.degree. to 700.degree. C. to crystallize the precursor film, thereby obtaining a piezoelectric film which is polycrystalline, and secondly heating the electrode at a temperature of 750.degree. to 1200.degree. C. in an oxygen-containing atmosphere, thereby controlling the size of crystal grains of the piezoelectric film, observable from the surface of the piezoelectric film to 0.4 .mu.m or more.
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Budd Mark O.
Seiko Epson Corporation
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