Electrical generator or motor structure – Non-dynamoelectric – Piezoelectric elements and devices
Patent
1997-04-04
1998-10-20
Dougherty, Thomas M.
Electrical generator or motor structure
Non-dynamoelectric
Piezoelectric elements and devices
310324, 310358, 73 5424, H01L 4108
Patent
active
058251197
ABSTRACT:
A sensor element for detecting solid particles in a fluid includes: a detecting unit including a piezoelectric film consisting essentially of a ceramic material, a first electrode coated onto at least a portion of the outer surface of the piezoelectric film, and a second electrode coated onto at least a portion of the inner surface of the piezoelectric film; a vibrating portion consisting essentially of a second ceramic material, the detecting unit being placed on the vibrating portion so that the second electrode is coated onto at least a portion of the vibrating portion; and a fixing portion for fixing the vibrating portion so that the vibrating portion may vibrate. At least one of the detecting unit and the vibrating portion contacts with a solid particle in the fluid so that the piezoelectric film converts the vibration into an electric signal. A particle sensor includes the sensor element. The sensor element and the particle sensor are excellent in particle detection precision and durability at low cost.
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Eckerle Joseph S.
Pelrine Ronald E.
Shibata Kazuyoshi
Shrader Eric J.
Takeuchi Yukihisa
Dougherty Thomas M.
NGK Insulators Ltd.
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