Digitally stepped deflection raster system and method of use the

Details Digitally stepped deflection raster system and method of use the Digitally stepped deflection raster system and method of use the

1996-11-27

1998-10-20

Nguyen, Kiet T.

Radiant energy

Irradiation of objects or material

Irradiation of semiconductor devices

250398, H01J 37304

Patent

active

058250395

ABSTRACT:
A digitally stepped deflection raster system and a method of operation thereof are disclosed. The digitally stepped deflection raster system operates to provide horizontal and vertical scans of an area of interest. The total length of each of the horizontal and vertical scans is proportioned into segments to provide non-continuous scanning signals that are arranged into predetermined raster patterns each of which reduces the deflection placement error of the digitally stepped deflection raster system.

REFERENCES:
patent: 4322626 (1982-03-01), Kawashima
patent: 4812661 (1989-03-01), Owen
patent: 5337247 (1994-08-01), Hamaguchi
patent: 5590048 (1996-12-01), Abe et al.

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