Electrical resistors – Strain gauge type – Fluid- or gas pressure-actuated
Patent
1988-05-23
1989-09-05
Goldberg, E. A.
Electrical resistors
Strain gauge type
Fluid- or gas pressure-actuated
338 36, 338 5, G01L 122
Patent
active
048642711
ABSTRACT:
A pressure sensor including a ceramic diaphragm which is deformable in response to a pressure applied thereto, a ceramic base associated with a periphery of the ceramic diaphragm, for supporting the ceramic diaphragm, and at least one resistor formed on the ceramic diaphragm. Resistance value of the resistor are adapted to vary depending upon a magnitude of deformation of the ceramic diaphragm, and thereby represent the pressure applied to the ceramic diaphragm. The ceramic diaphragm and the ceramic base consist of a co-fired body obtained by co-firing an unfired diaphragm member and an unfired base member.
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Goldberg E. A.
Lateef M. M.
NGK Insulators Ltd.
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