Integration of surface emitting laser and photodiode for monitor

Details Integration of surface emitting laser and photodiode for monitor Integration of surface emitting laser and photodiode for monitor

1994-10-31

1996-02-13

Bovernick, Rodney B.

Coherent light generators

Particular active media

Semiconductor

372 96, H01S 318

Patent

active

054917123

ABSTRACT:
The present invention provides a structure and method for integrating a photodiode and surface emitting laser on a substrate which minimizes both process complexity and exposure of epitaxial layers. In a first embodiment, a photodiode structure is integrated with the surface emitting laser simply by adding a separate Schottky contact to the surface of the SEL. In a second embodiment, a photodiode structure is integrated with the surface emitting laser by positioning a current isolation region between the photodiode and the SEL. The current isolation region should extend into a first mirror region but not into the light generation region of the active region so that the light generation region of the SEL is optically coupled to the light absorption region of the photodiode.

REFERENCES:
patent: 5331658 (1994-07-01), Shieh et al.
G. Hasnain, K. Tai, Y. H. Wang, J. D. Wynn, K. D. Choquette, B. E. Weir, N. K. Dutta, and A. Y. Cho, "Monolithic Integration of a Photodetector and a Vertical Cavity Surface Emitting Laser", Electronic Letters, vol. 27, No. 18, 1991, pp. 1630-1632. (No Month).
K. D. Choquette, N. Tabatabaie, and R. E. Leibenguth, "Detector-Enclosed Vertical Cavity Surface Emitting Lasers", Electronic Letters, vol. 29, No. 5, Mar. 4, 1993, pp. 466-467.
G. Hasnain, K. Tai, Y. H. Wang, J. D. Wynn, K. D. Choquette, B. E. Weir, N. K. Dutta, and A. Y. Cho, "Monolithic Integration of a Photodetector and a Vertical Cavity Surface Emitting Laser", 49th Annual Device Research Conference, Jun. 18-19, University of Colorado at Boulder, Paper IIIA-5 (No Year).

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